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White Papers > Materials and Gases

300-mm silicon on insulator (SOI): the time for adoption and technology shift

01 March 2004 | Edition 21, Materials and Gases
Titus Menzies, CFA, Technology Analyst, The Street.com Read more >>

Bilayer resist method for dual damascene processes and advanced devices

01 December 2003 | Edition 20, Materials and Gases
Peter Cirigliano, Reza Sadjadi, & Amulya Athayde, Lam Research Corp., Fremont, CA, USA, George Barclay, Jerome Wandell, & Frank Fischer, Shipley Company, LLC, Marlborough, MA, USA Read more >>

Securing F2 supply for the semiconductor and TFT-LCD industries

01 September 2003 | Edition 19, Materials and Gases
Takako Kimura, Kayo Momoda & Jun Sonobe, Air Liquide Laboratories,Wadai 28, Tsukuba-Shi, Ibaraki-ken, Japan. Yoshihiro Ueno, Air Liquide Japan, Roppongi 1-chome, Minato Ku, Tokyo 106-6010, Japan. Jean-Marc Girard, Air Liquide Electronics Corporate Division, Paris, France Read more >>

Valve Seal Solution Eliminates Coolant Leakage Problem, has Potential to Save Fabs $500,000 or More

01 December 2002 | Edition 15, Materials and Gases
JOHN BAXTER, Swagelok Company, Solon, OH, USA Read more >>

The Preservation of Purity or The Art of Packaging

01 December 2002 | Edition 15, Materials and Gases
WOLFGANG J. SIEVERT, Honeywell Seelze GmbH, Seelze, Germany Read more >>

Risk reduction strategies and alternatives for high pressure gases

01 September 2002 | Edition 17, Materials and Gases
W. Karl Olander & Luping Wang, ATMI Inc., Danbury, CT, USA Read more >>

Modular Gas Systems provide Versatility, Serviceability, and Ease of Assembly

01 March 2002 | Edition 16, Materials and Gases
JOHN BAXTER, Swagelok Company, Solon, OH, USA Read more >>

Chemical Management Services: Case Study in the Semiconductor Industry

01 March 2002 | Edition 16, Materials and Gases
DARCY WHALEY, Chemical Strategies Partnership, San Francisco, CA, USA WILLIAM KOHNEN, Analog Devices, Inc., Santa Clara, CA, USA Read more >>

Fluids Purity Capabilities or Line Widths: Who’s Driving?

01 June 2001 | Edition 14, Materials and Gases
MARTINE RIBEYRON & MICHEL FUENTES, STMicroelectronics, Crolles, France ALAIN FERRERES, STMicroelectronics, Rousset, France Read more >>

An Ultra-High-Purity Bulk Specialty Gas Package for 300mm Wafer Fabrication

01 June 2001 | Edition 14, Materials and Gases

ROBERT TORRES, JOSEPH VININSKI, BELGIN YUCELEN & VIRGINIA HOULDING, Matheson Tri-Gas Advanced Technology Center,
Longmont, CO, USA
DAVID TREADWELL, CP Industries, Inc., McKeesport, PA, USA
JOHN W. FELBAUM, Digital Wave Corporation, Englewood, CO, USA 

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