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White Papers > Edition 27

Sensing and sensitivity: Key trends in vibration management in the fab environment

01 August 2005 | Edition 27, Cleanroom
Tim Kent & John Paul McKeown, Reactec, Edinburgh, Scotland Read more >>

SEMIĀ® F57-0301 and beyond: Advancing standards for ultra high-purity fluoropolymer components

James M. Hanson, Swagelok Company, Ronnie A. Browne & Robert A. Shutler, Swagelok Semiconductor Services Company, Santa Clara, California, USA Read more >>

Easy vacuum solution for the load locks in the DEPx coating system

Martin Bijker, OTB-Solar, Eindhoven, Netherlands, Chistopher M. Rippl & Frank Klabunde, Pfeiffer  Read more >>

Impact of single-wafer clean on manufacturing efficiency ā?? semiconductor fab perspective

01 August 2005 | Edition 27, Fab Management
Ashwin Ghatalia, Kranthi Adusimilli, Dave Dyer, Walter Worth, Robert Wright, Phil Naughton, Joel Barnett, Steve Burnett Read more >>

Real-time monitors: Review and lithography applications

01 August 2005 | Edition 27, Lithography
Robin Danfelt, Senior Contamination Control Engineer, Nikon Precision, Belmont, CA, USA Read more >>

AFM in silicon technology development

01 August 2005 | Edition 27, Lithography
Vladimir A. Ukraintsev, Silicon Technology Development, Texas Instruments Inc., Dallas, TX, 75265, USA Read more >>

Optimizing the selection and supply of hf precursor candidates for gate oxide

A. Soulet, L. Duquesne, G. Jursich & R. Inman, American Air Liquide, Chicago research Center, IL, USA,
A. Misra, Air Liquide Electronics U.S. LP, Dallas, TX, USA, N. Blasco, C. Lachaud, Y. Marot, R. Prunier &
M. Vautier, Air Liquide Centre de Recherches Claude Delorme, Jouy-en-Josas, France, & S. Anderson,
P. Clancy & M. Havlicek, Air Liquide – Balazs™ Analytical Services, CA, USA Read more >>

Materials development in volume semiconductor fabrication

Bill Reith, Senior Supplier Quality Engineer, Freescale Semiconductor, Scotland Read more >>

Manufacturable strained silicon technology

P.R. Chidambaram, Texas Instruments, Richardson, TX, USA Read more >>

Gate spacer engineering for improved boron dose retention

John Gumpher, Tokyo Electron America, Austin, TX, USA, Narendra Mehta & Wayne Bather, Texas Instruments, Dallas, TX, USA Read more >>