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White Papers > Edition 24

Suppression of boron diffusion in Si and SiGe devices by fluorine implantation

01 December 2004 | Edition 24, Materials and Gases
Professor Peter Ashburn, Director & Technical Advisor, Innos, Southampton, UK Read more >>

X-ray metrology for front-end applications

01 December 2004 | Edition 24, Materials and Gases
D.E. Joyce & P.A. Ryan, Bede, Durham, UK, & M.Wormington, Bede, Englewood, CO, USA Read more >>

E=MC3 a review of copper annealing processes and equipment

01 December 2004 | Edition 24, Wafer Processing
Ken Sautter, KMS Enterprises, Stuart Allen & Bill Moffat, Yield Engineering Systems Inc., San Jose, CA, USA Read more >>

Development of multi-levelinterconnect technologies for 2nd generation 65nm node VLSIs

01 December 2004 | Edition 24, Wafer Processing
Yoshihiro Hayashi, System Devices Research Laboratories, NEC Read more >>

Breakthrough technology for CMP

01 December 2004 | Edition 24, Wafer Processing
Dr. Liang Chen, General Manager, CMP Division, PPC Product Business Group, Applied Materials Inc, USA Read more >>

Advanced gate electrodes for future generation CMOS

01 December 2004 | Edition 24, Wafer Processing
Prashant Majhi, (Assignment from: Philips Semiconductors), Huang-Chun Wen, Gennadi Bersuker, George Brown, Byoung-Hun Lee, (Assignment from: IBM), & H. Huff, SEMATECH, Austin, Texas, USA Read more >>

Advanced CMP consumable design for defectivity control

01 December 2004 | Edition 24, Wafer Processing
Halbert Tam, JSR Micro, Inc., Sunnyvale, CA, USA & Nobuo Kawahashi, JSR Corporation, Yokkaichi, Japan Read more >>

Advanced coating technologies improve process chamber performance

01 December 2004 | Edition 24, Cleanroom
J.W. Epton, BOC Edwards, Crawley, UK Read more >>

The current state of the robotics industry

01 December 2004 | Edition 24, Critical Components
John West, VLSI Research Europe, UK Read more >>

Optimized 300mm vacuum pumping requires an understanding of choices

01 December 2004 | Edition 24, Critical Components
David J. Hilton, Busch Semiconductor Vacuum Group, Morgan Hill, CA, USA Read more >>