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White Papers > Edition 14

Environmental Safety and Health in the Semiconductor Industry – Challenges and Collaboration

01 June 2001 | Edition 14
C. MARK MELLIAR-SMITH, International SEMATECH, Austin, TX, USA Read more >>

An Improved Technique for Evaluating Point-of-use Abatement Systems

01 June 2001 | Edition 14
SHOU-NAN LI, JUNG-NAN HSU & GEN-HOU LEU, Industrial Technology Research Institute, CESH, Chutung, Taiwan
KIREL TANG & CHUNG-LING CHIU, BOC Edwards, Toufen Town, Taiwan Read more >>

Progress in Materials Development for 157nm Photolithography: Photoresists and Pellicles

01 June 2001 | Edition 14, Lithography
ROGER H. FRENCH, JERALD FELDMAN, FREDRICK C. ZUMSTEG, MICHAEL K. CRAWFORD,
ANDREW E. FEIRING, VIACHESLAV A. PETROV, FRANK L. SCHADT III & ROBERT C. WHELAND,
DuPont Co., iTechnologies and Central Research and Development, Wilmington, DE, USA
JOSEPH GORDON & EDWARD ZHANG, DuPont Photomasks Inc., Danbury, CT, USA Read more >>

Consequences of ITRS Roadmap Acceleration for Device Makers on Advanced Lithography Integration into

01 June 2001 | Edition 14, Lithography

Consequences of ITRS Roadmap Acceleration for Device Makers on Advanced Lithography Integration into Development and Release of Technology

JAN-WILLEM GEMMINK, Philips Semiconductors, Nijmegen, The Netherlands
PETER ZANDBERGEN, Philips Semiconductors, Kapeldreef, Leuven, Belgium

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ArF Lithography Options for 100nm Technologies

01 June 2001 | Edition 14, Lithography
GEERT VANDENBERGHE, YOUNG-CHANG KIM, CHRISTIE DELVAUX, KEVIN LUCAS,
SANG-JUN CHOI, MONIQUE ERCKEN & KURT RONSE, IMEC, Leuven, Belgium
BERT VLEEMING, ASML, Veldhoven, Holland Read more >>

Fluids Purity Capabilities or Line Widths: Who’s Driving?

MARTINE RIBEYRON & MICHEL FUENTES, STMicroelectronics, Crolles, France ALAIN FERRERES, STMicroelectronics, Rousset, France Read more >>

An Ultra-High-Purity Bulk Specialty Gas Package for 300mm Wafer Fabrication

ROBERT TORRES, JOSEPH VININSKI, BELGIN YUCELEN & VIRGINIA HOULDING, Matheson Tri-Gas Advanced Technology Center,
Longmont, CO, USA
DAVID TREADWELL, CP Industries, Inc., McKeesport, PA, USA
JOHN W. FELBAUM, Digital Wave Corporation, Englewood, CO, USA 

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A Comprehensive Approach for Delivery of Low-vapour-pressure Process Chemicals

JEAN M. FRIEDT, Air Liquide, Paris, France
HWA CHI WANG, RICK UDISCHAS, Air Liquide, Countryside, IL, USA
HERVE DULPHY, Air Liquide, Le Pont de Claix, France Read more >>

The SiGe:C Epitaxy Process

JILL C. HILDRETH, JEFFREY A. CHAN, ANDREW S. MORTON & HEATHER KRETZSCHMAR, Motorola Inc., Chandler, AZ, USA Read more >>

The Industry Transition to Single Wafer Thermal Processing

NOLAN KUAN, Applied Materials, Inc., Santa Clara, CA, USA Read more >>