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White Papers > Edition 10

Environmental Requirements Applicable to Copper-Based Semiconductor Deposition Processes in the…

01 December 1999 | Edition 10, EHS
Environmental Requirements Applicable to Copper-Based Semiconductor Deposition Processes in the United Kingdom, Ireland, Singapore and Taiwan Read more >>

Effective PFC Gas Abatement in a Production Environment

01 December 1999 | Edition 10, EHS
ANDREW SEELEY, PHIL CHANDLER, STEVE COTTLE & PETER MAWLE,
BOC Edwards Exhaust Management Systems, Nailsea, UK Read more >>

Characterization of Process Emissions Using FTIR Technology â?? A Case Study: Emissions and…

01 December 1999 | Edition 10, EHS
Characterization of Process Emissions Using FTIR Technology – A Case Study: Emissions and Emission By-Products from Epitaxial Reactors

JON SIGLER, STMicroelectronics Inc., Carrolton, TX, USA
CURTIS LAUSH, Radian International Electronic Systems, Austin, TX, USA Read more >>

The Impact of Conveyor Transports on Factory Performance at Infineonâ??s (Siemens) 200-mm Fab

01 December 1999 | Edition 10, Fab Management
HARALD HEINRICH, Infineon Technologies, Dresden GmbH & Co. OHG, Dresden, Germany
ADRIAN PYKE, Middlesex General Industries Inc., Woburn, MA, USA Read more >>

Recipe Management: A Matter of Efficiency

01 December 1999 | Edition 10, Fab Management
TODD C. WILLIAMS, Compaq Computer Corporation, Camas, WA, USA Read more >>

Industrial Web Technology: A Review of the Alternatives

01 December 1999 | Edition 10, Fab Management
CHARLES H. GIFFORD, Power Engineers, Inc. Hailey, ID, USA
JUSTIN TYLER & MARK F. DUENAS, Power Engineers, Inc. Boise, ID, USA Read more >>

Increasing Overall Equipment Effectiveness (OEE) in Fab Manufacturing

01 December 1999 | Edition 10, Fab Management | Comments (1)
SASS SOMEKH, Applied Materials, Inc., Santa Clara, CA, USA Read more >>

Enterprise Production Systems Delivering the Promise

01 December 1999 | Edition 10, Fab Management
STEVEN BUDDE, USDATA Corporation, Richardson, TX, USA Read more >>

A Planning and Control Model for Customer-Oriented IC Development and Manufacturing

01 December 1999 | Edition 10, Fab Management
FRANK FRAUENHOFFER & ROLAND STURM, Fraunhofer Institute Manufacturing Engineering and Automation (FhG-IPA),
Stuttgart, Germany
GEORG MÖNCH, MARIO VON PODEWILS, KNUD RICHTER & VOLKER SCHMALFUß, Thesys Gesellschaft für Mikroelektronik mbH, Erfurt, Germany Read more >>

A New Low Cost Approach in 200 mm and 300 mm AMHS

01 December 1999 | Edition 10, Fab Management
THOMAS ARZT, Clean Room Consulting GmbH, Freiburg, Germany
FREDDY BULCKE, eFBe International Marketing and Engineering Consultancy bvba, Belgium Read more >>