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White Papers > Edition 09

Preventing Fires in Semiconductor Cleanrooms

01 March 1999 | Edition 09, Cleanroom
LAWRENCE SHEA, Shea Technology, Reno, NV, USA Read more >>

Point-of-Use Exhaust Control for Semiconductor Manufacturing: Saving Energy, Saving Money, Improving

01 March 1999 | Edition 09, Cleanroom

Point-of-Use Exhaust Control for Semiconductor Manufacturing: Saving Energy, Saving Money, Improving Yield

DANIEL HALL, Progressive Technologies Inc., Tewksbury, MA, USA 

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Effective Construction Cost and Schedule Control

01 March 1999 | Edition 09, Cleanroom
M. EL-MASHALEH, Royal Corps of Engineers, Jordan Armed Forces, Jordan
DR. A.D. CHASEY, Arizona State University, Tempe, AZ, USA Read more >>

Designing Chilled-Water Systems for the 21st Century

01 March 1999 | Edition 09, Cleanroom
J. W. BENSON, The Trane Company, La Crosse, WI, USA Read more >>

Benchmarking Wafer Fabrication Process Tool Hook-up A Proposed Standard Methodology for the…

01 March 1999 | Edition 09, Cleanroom

Benchmarking Wafer Fabrication Process Tool Hook-up A Proposed Standard Methodology for the Industry

A. WELLS, Siemens Microelectronics Ltd., Newcastle on Tyne, UK

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VOC Abatement at Texas Instruments Using the Zeolite Concentrator Technology ?? A Case Study

01 March 1999 | Edition 09, EHS
ALISON M. MCDOUGALL, Munters, Amesbury, MA, USA
CAMILLE N. LUCKADOO, Texas Instruments, Santa Cruz, CA, USA Read more >>

Remote NF3 Chamber Clean Virtually Eliminates PFC Emissions from CVD Chambers and Improves System…

01 March 1999 | Edition 09, EHS

Remote NF3 Chamber Clean Virtually Eliminates PFC Emissions from CVD Chambers and Improves System..

S. RAOUX, Applied Materials, Santa Clara, CA, USA
J. G. LANGAN, Air Products and Chemicals, Allentown, PA, USA

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Fab Revenue Opportunities from Systematic Risk Management

01 March 1999 | Edition 09, EHS
ROB MOODY PE AND V. DEGIORGIO, Technology Risk Consulting Services, LLC, San Jose, CA, USA
DR. DANNY LAM PHD/MBA AND DR. J. KANZ, PHD/MBA, Fisher-Holstein, Inc., Scottsdale, AZ, USA Read more >>

Worldwide IC Capacity Trends

01 March 1999 | Edition 09, Fab Management
BILL MCCLEAN, IC Insights, Inc., Scottsdale, AZ, USA
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Windows NT-based Manufacturing Execution Systems

01 March 1999 | Edition 09, Fab Management

The New Heart of Integrated Semiconductor Manufacturing

 

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