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White Papers > Cleanroom

Intelligent and Inventive Outsourced Facility Management Solutions for the Semiconductor Industry

01 March 2000 | Edition 11, Cleanroom
TONY WELLS, M+W Zander FM Ltd, Wallsend, Tyne & Wear, UK Read more >>

Improving Processes Through RF Power Control

01 March 2000 | Edition 11, Cleanroom
CARL ALMGREN, JIM EVANS & RANDY HECKMAN, Advanced Energy Industries, Inc., Fort Collins, CO, USA Read more >>

Identifying the Types and Potential Sources of Airborne Molecular Contamination: A Multi…

01 March 2000 | Edition 11, Cleanroom | Comments (1)

Identifying the Types and Potential Sources of Airborne Molecular Contamination: A Multi-Technique Approach

PATRICK H. SCHNABEL & PATRICIA M. LINDLEY, Charles Evans & Associates, Redwood City, CA, USA
DAVID NEHRKORN & MARIUS KENDALL, Surface Science Laboratories, Mountain View, CA, USA

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Conserving Natural Resources in Wafer Fabs

01 March 2000 | Edition 11, Cleanroom
ROGER BONISOLLI & CHARLES LYNN, ADP Marshall, Tucson, AZ, USA
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A Guide to Understanding Surge Suppression Specifications: Part 2

01 March 2000 | Edition 11, Cleanroom
PAUL DELAUP, Lightning Elimination Systems, Covington, LA, USA
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Vibration Isolation Legs for Semiconductor Tools: A Superior Alternative to Tool Pedestals

01 December 1999 | Edition 10, Cleanroom
PAUL ATTAWAY & ZOLTAN KEMENY, Vistek Inc., Tempe, AZ, USA Read more >>

Transients and Their Impact on Power Quality: Part 1

01 December 1999 | Edition 10, Cleanroom
PAUL DELAUP, Lightning Elimination Systems, Covington, LA, USA Read more >>

Site Analysis, Selection, and Development: Exposed vs. Sheltered High Technology Industries

01 December 1999 | Edition 10, Cleanroom
DANNY LAM Fisher-Holstein Inc., San Jose, CA, USA
JOHN KANZ, Fisher-Holstein Inc., Scotsdale, AZ, USA Read more >>

Micro-Vibration Criteria for 300 mm and Beyond

01 December 1999 | Edition 10, Cleanroom
KEITH W. LEUNG & CHRIS A. PAPADIMOS, Advanced Engineering Solutions, Fairfax, CA,USA Read more >>

Energy Efficiency Opportunities in Silicon Ingot Manufacturing

01 December 1999 | Edition 10, Cleanroom
BRYAN FICKETT, GREG MIHALIK, Siemens Solar, Vancouver, WA, USA Read more >>