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White Papers > Cleanroom

Can vibration be controlled with damped concrete?

01 June 2005 | Edition 26, Cleanroom
Hal Amick, Ph.D., P.E., Colin Gordon & Associates, San Bruno, CA, USA Read more >>

Considerations regarding the appropriate timing for advanced technology facility vibration surveys

01 March 2005 | Edition 25, Cleanroom
Hal Amick, Ph.D., P.E., Michael Gendreau, INCE.Bd.Cert, Colin Gordon & Associates, San Bruno, CA, USA Read more >>

Advanced coating technologies improve process chamber performance

01 December 2004 | Edition 24, Cleanroom
J.W. Epton, BOC Edwards, Crawley, UK Read more >>

A life-cycle cost (LCC) fab model ?? interaction between activities in IC manufacturing and their s

01 August 2004 | Edition 23, Cleanroom
A life-cycle cost (LCC) fab model – interaction between activities in IC manufacturing and their supporting facilities within a fab

N. Van Hoornick, K. Van den Broeck, J. Van Hoeymissen & M. Heyns, IMEC, Heverlee, Belgium, W. Riedel & C. Braun, M+W Zander, Stuttgart, Germany

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Some viewpoint of particles concentration control in 300-mm DRAM cleanroom fab design

01 December 2003 | Edition 20, Cleanroom
Andy Yang, ProMOS Technologies Inc. Hsinchu, Taiwan, R.O.C.
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GSMC ?? Quality first in the PRC

01 September 2003 | Edition 19, Cleanroom
Yeong Ruey Shiue, GSMC, Shanghai, People’s Republic of China & Stephen M. Malmros AIA, IDC, Shanghai, Peoples Republic of China Read more >>

Can fab costs be controlled? Part 1

01 September 2003 | Edition 19, Cleanroom
Michael Bonner (formerly with Advanced Energy Industries, Inc.), & Randall Clark, IBM Microelectronics Read more >>

The SC300 ultrapure water plant ?? a balance between investment costs, operational costs and qualit

01 March 2003 | Edition 18, Cleanroom
Dr. Martin Weltzer, Siemens Industrial Building Consultants GmbH & Co. OHG, Munich, Germany Read more >>

Fan-Filter Unit (FFU) Test Procedures

01 December 2002 | Edition 15, Cleanroom
MING-SHAN JENG & FANGHEI TSAU, Industrial Technology Research Institute, Chutung, Taiwan, ROC Read more >>

Energy Savings Turn into Cash Flow Savings

01 December 2002 | Edition 15, Cleanroom
PHIL NAUGHTON, Motorola Facilities Technology Center, Austin, TX, USA Read more >>