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Edition 38: Chiller plant optimization

21 January 2009 | Edition 38, Cleanroom

FT38By Terrence Morris & Steve Blaine PE, CH2M HILL, Oregon, USA

Outside of the process tools themselves, the chilled water plant is typically the single largest consumer of electrical energy in a semiconductor facility. This load includes not just chillers but also cooling tower fans, primary pumps, secondary pumps and condenser pumps. In order to meet the cooling requirements for any particular heat load, many different combinations of this equipment can be run. However, electricity consumption varies considerably depending on the combination of equipment used and the operating levels of the individual components. Selecting the optimal mix of equipment and operating levels presents a substantial challenge for an automatic control system and plant operators. Typically, no method is available to predict the effect of interactions and variations in load demand and outside air. This makes it challenging, if not impossible, to find an equipment mix that achieves optimal energy use. In response to this challenge, we set out to create a model/tool that would allow operators to automatically determine the optimal equipment mix to satisfy cooling requirements and minimize energy use. This paper describes how this model was created and how it works.

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Point-of-use abatement of tool exhaust emissions: a technology overview

01 September 2007 | Edition 35, Cleanroom
Walter F. Worth, International SEMATECH Manufacturing Initiative, USAa Read more >>

New cooling water control technology facilitates fabsā?? water reuse strategies

01 April 2007 | Edition 33, Cleanroom
By Jay Duncombe, Intersil; Eric Madera, Linear Technologies; John Brooks, Daniel Cicero, Dr. Steven Hatch, Brian Jenkins, Kevin Olson and Barry Carroll, Nalco Company Read more >>

Site selection for semiconductor manufacturing facilities - current practice and future trends

01 December 2006 | Edition 32, Cleanroom
Steffen Weiser, IBM, Belgium Read more >>

How green is your fab?

01 September 2006 | Edition 31, Cleanroom
James Beasley, International SEMATECH Manufacturing Initiative (ISMI), USA Read more >>

Improving the interface between process equipment and facility systems through Design for Facilities

01 June 2006 | Edition 30, Cleanroom
Allan D. Chasey, PhD, PE, Del E. Webb School of Construction, Arizona State University, USA Read more >>

Rapid tool installation: a process for all concerned

01 March 2006 | Edition 29, Cleanroom
Kandi Collier, Intel Corporation, USA, Don Yeamen, M+W Zander, USA, Nick de Vries, Applied Materials, USA, Arnold Canales, Kinetics, USA, Dr Allan Chasey, Arizona State University, USA Read more >>

Magnetic fields and the technology challenges they pose (a semiconductor perspective)

01 December 2005 | Edition 28, Cleanroom
Julian A. Montoya and Vincent Esqueda, Intel Corporation Read more >>

Buildings for nanotechnology: a look back at the genesis of a new building type

01 December 2005 | Edition 28, Cleanroom
Hal Amick, Colin Gordon & Associates Read more >>

Sensing and sensitivity: Key trends in vibration management in the fab environment

01 August 2005 | Edition 27, Cleanroom
Tim Kent & John Paul McKeown, Reactec, Edinburgh, Scotland Read more >>