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VOC Abatement at Texas Instruments Using the Zeolite Concentrator Technology – A Case Study
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ALISON M. MCDOUGALL, Munters, Amesbury, MA, USA
CAMILLE N. LUCKADOO, Texas Instruments, Santa Cruz, CA, USA
ABSTRACT
As a result of two major fab remodels in the last seven years, Texas Instruments’ Santa Cruz, California site (see Figure1) has been involved in an on-going production ramp. This plant, part of TI’s storage products group, manufactures semiconductors primarily for the disk drive market. As fab loading nears capacity, production levels over the next several months are projected to result in the (unabated) potential- to-emit (PTE) approaching the State and Federal BACT limits for VOC emissions. To prevent triggering these limits, TI chose to install a VOC abatement system to treat a portion of the VOC-laden exhaust sources from the fab. By being proactive and reducing emissions, TI will be able to avoid the BACT trigger levels.
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