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Vibration Issues in Facility Refurbishing

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C. GORDON, Colin Gordon & Associates, San Mateo, CA, USA

ABSTRACT

Vibration is a major source of contamination in any Fab facility and can have disastrous effects on plant output. When a Fabrication plant is needed to be updated, the existing stru c t u re of the buildings may re q u i re extensive alteration to meet the new criteria of future operation. The sources of vibration both external and internal to the facility are examined in detail and appropriate solutions described.

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