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PASCAL RUDENT, Qualiflow® SA, Montpellier, France

ABSTRACT

In the semiconductor industry, most gases are hazardous and toxic. Mass Flow Controller manufacturers calibrate their devices with a surrogate gas and apply a correction factor to simulate the behaviour of the process gas. However, when this constant factor is used, the accuracy of the calibration is not precise. Qualiflow has made a numerical simulation of the sensor of the Mass Flow Controller to build polynomial correction factors. This approach when added to numerical control of digital Mass Flow Controllers will be a crucial step towards accurate and customised ‘multicalibrated’ Mass flow Controllers. It will be possible for the customer to calibrate the MFC for another gas at another flow-rate from an existing calibration with high accuracy.