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The SC300 ultrapure water plant – a balance between investment costs, operational costs and qualit
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Dr. Martin Weltzer, Siemens Industrial Building Consultants GmbH & Co. OHG, Munich, Germany
ABSTRACT
The article describes the SC300 ultrapure water (UPW) plant as an example how the project objective was realized and includes information about design aspects, water quality specification and vendor selection criteria’s. The UPW plant is one of the key elements of the production facility. Beside the cost aspects the plant has to meet stringent quality specifications to secure the wafer yield. Based on a calculated cost target, which was derived from Infineon’s 300mm business plan and the experiences gained from earlier 200 mm Fabs, the UPW expert team developed different technical concepts and they investigated the resulting.
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