Online information source for semiconductor professionals

Securing F2 supply for the semiconductor and TFT-LCD industries

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

Takako Kimura, Kayo Momoda & Jun Sonobe, Air Liquide Laboratories,Wadai 28, Tsukuba-Shi, Ibaraki-ken, Japan. Yoshihiro Ueno, Air Liquide Japan, Roppongi 1-chome, Minato Ku, Tokyo 106-6010, Japan. Jean-Marc Girard, Air Liquide Electronics Corporate Division, Paris, France


This article deals with how to secure a safe and reliable F2 supply at semiconductor manufacturing sites in accordance with the local regulations and the unique circumstances. In order to overcome the drawbacks and concerns of F2 supply, a solution package based on the risk assessment and a material compatibility study is described. As a result a safe, reliable and high-purity F2 supply is available according to the needs of the end user whether by gas cabinet or by on-site generation system, as has been already demonstrated through a continual commercial operation.

Download Please login to download the paper. No account yet? Please register. It's free!

Related articles

Praxair ups silane prices by as much as 30 percent - 03 April 2008

Bosch Rexroth and Middlesex Industries team on cleanroom conveyor systems - 08 September 2008

Automating Environmental, Health and Safety Management in the Semiconductor and Other High… - 01 June 2000

Supply Chain Issues for Semiconductor Foundries - 01 March 2002

Qualcomm to ramp 65nm at TSMC & IBM from 2Q06 onwards - 08 November 2005

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: