Online information source for semiconductor professionals
Securing F2 supply for the semiconductor and TFT-LCD industries
Popular articles
Voltaix names Peter Smith as CEO - 09 November 2011
Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010
TSMC hosts 2008 Green Forum on ‘green’ factories - 31 October 2008
Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008
TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008
Takako Kimura, Kayo Momoda & Jun Sonobe, Air Liquide Laboratories,Wadai 28, Tsukuba-Shi, Ibaraki-ken, Japan. Yoshihiro Ueno, Air Liquide Japan, Roppongi 1-chome, Minato Ku, Tokyo 106-6010, Japan. Jean-Marc Girard, Air Liquide Electronics Corporate Division, Paris, France
ABSTRACT
This article deals with how to secure a safe and reliable F2 supply at semiconductor manufacturing sites in accordance with the local regulations and the unique circumstances. In order to overcome the drawbacks and concerns of F2 supply, a solution package based on the risk assessment and a material compatibility study is described. As a result a safe, reliable and high-purity F2 supply is available according to the needs of the end user whether by gas cabinet or by on-site generation system, as has been already demonstrated through a continual commercial operation.
 |
Please login to download the paper. No account yet? Please register. It's free! |