W. Karl Olander & Luping Wang, ATMI Inc., Danbury, CT, USA
Gases are an integral part of semiconductor manufacturing and usage is growing. Considerations for purity and ease of handling for gases versus liquids and solids are huge. Packaging and dispensing improvements are on the horizon which will increase gas safety and reduce costs. This article discusses a promising strategy to reduce the risk of using compressed gases and contrasts it with conventional high pressure gas delivery.