Online information source for semiconductor professionals

Rapid tool installation: a process for all concerned

Popular articles

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008

Kandi Collier, Intel Corporation, USA, Don Yeamen, M+W Zander, USA, Nick de Vries, Applied Materials, USA, Arnold Canales, Kinetics, USA, Dr Allan Chasey, Arizona State University, USA

ABSTRACT

The International Technology Roadmap for Semiconductors (ITRS) has defined several difficult challenges that will face the semiconductor industry over the next 10 to 15 years. As part of the challenge, the industry continues to demand facilities that are increasingly reliable, less expensive, faster to build and come on-line more quickly. At the same time, process equipment requirements, ESH compliance and factory operating flexibility continue to drive increased facility capital and operating costs. Process equipment installation time and costs continue to be driven higher by more gas, chemical and utility points of connection and ESH compliance requirements. As the industry develops new processes and process tools, design and construction firms will be challenged to continue to reduce the time to ramp factories to their full operating capacity. This challenge will be further complicated by:
• Rapid and frequent tool layout changes
• Increasing installation complexity while keeping costs in check
• Integrating rapid changes in process technologies into the manufacturing process
• Minimizing manufacturing downtime when converting to new technologies
• Reusing existing buildings, process and support equipment.

Download Please login to download the paper. No account yet? Please register. It's free!

Related articles

Tool order: Tegal receives follow-on order for 4200 SE cluster tool - 08 June 2010

New Product: NEHP‚??s pre-designed utility modules cut tool install complexity - 14 August 2007

New Product: NEHP offers solutions for rapid low-cost tool hook-up projects - 08 July 2008

New Product: FEI launches first remote diagnostics program for microscopy tools - 05 June 2007

Intel’s EHS facilities equipment procurement process - 01 December 2006

Reader comments

No comments yet!

Post your comment

Name:
Email:
Please enter the word you see in the image below: