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Pushing the Limits of Factory Automation
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KEN HURLEY, Nanya Technology Corp., San Jose, CA, USA
ABSTRACT
The goal of factory automation in the semiconductor industry is full lights-out production. The factors that will require attention are listed in this article. Nanya’s experience with automating its operations is described. The automation application product used was an open system complying with SEMI standards, the CIM Framework Standard and internationally recognised standards for object-oriented programming.
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