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Process Requirements for Mass Flow Controllers

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GREGORY H. LEGGETT & EDWIN K. ARRANT, Millipore, Allen, TX, USA

ABSTRACT

Slight changes in operating conditions of Mass Flow Controllers can have subtle but profound effects on production schedules. Constant monitoring and integration into the Fab network system for device management can lead to significant advantages. The monitoring requirements are examined and the use of intelligent sensors, their integration and the effect on networking operational efficiency are discussed.

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