Online information source for semiconductor professionals

BRETT JAY DAVIS, Motorola, Austin, TX, USA

ABSTRACT

The compound semiconductor industry manufactures an array of semiconductor products on substrates other than silicon oxide. The chemicals used and the wastes generated by this industry are often different in quantity and type from those in the silicon oxide semiconductor industry. The hazards of these substrates, chemicals and wastes result in the applicability of a host of environmental, health and safety (EHS) programmes, driven domestically and internationally by governmental agencies, professional and standards organisations, and customers. This article will discuss the hazards of the substrates, chemicals and wastes and identify many existing and pending programmes applicable to them. New waste treatment technologies are discussed and support organisations for EHS professionals in the compound semiconductor industry are listed.