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PFC Emissions Reduction: Technical Requirements and Challenges for Semiconductor Operations
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JEFFREY D. WILLIAMS, Department of Defense, Ft. Meade, MD, USA
ABSTRACT
For several years the semiconductor industry has engaged in an active and broad based programme to identify and reduce PFC emissions from semiconductor manufacturing operations. This effort has included working with the EPA in a partnership to address PFC emission reductions. Numerous technical issues have made emission reductions a complex issue. Fab age, wafer size, process operations and chemical uses all pose challenges in an emission-reduction programme. Four viable options are available and are needed to address the needs of diverse fab operations.
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