Online information source for semiconductor professionals
PFA trace metals leaching – determining future improvements in bulk chemical delivery distribution
Popular articles
Voltaix names Peter Smith as CEO - 09 November 2011
Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010
TSMC hosts 2008 Green Forum on ‘green’ factories - 31 October 2008
Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008
TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008
Kevin Pate, Intel Corporation, Oregon, USA
ABSTRACT
Trace metal contamination in process chemicals can detrimentally affect performance of the electronic device on the wafer. Bulk chemical delivery systems use ‘high purity’ plastics (generally PFA based) for distribution system tubing, valves, fittings, and vessels to enable clean delivery of process chemicals to wafer processing tools. This trace metals extraction (leaching) study determined the amount and rate that trace metals diffuse out of PFA plastics into process chemicals over time. The study also determines whether transition to higher purity PFA resins will be required in the near future to meet increasingly stringent purity requirements for the wafer manufacturing process.
 |
Please login to download the paper. No account yet? Please register. It's free! |