Online information source for semiconductor professionals
Next-Generation PFA for the Semiconductor Industry
Popular articles
Voltaix names Peter Smith as CEO - 09 November 2011
Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010
TSMC hosts 2008 Green Forum on ‘green’ factories - 31 October 2008
Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008
TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008
ABSTRACT
PFA (tetrafluoroethylene and perfluoroalkylvinylether copolymer) is used to manufacture tubing, wafer baskets, tank linings, etc. used in the wet processes of the semiconductor industry. We have developed a new type of PFA to meet the market demand for higher purity and performance. Its main characteristic is reduced spherulite size, which is controlled to improve the transparency, smoothness, and solution permeability of the final components. Stress crack resistance is also improved by optimising polymer composition. These physical properties will contribute to improving production yield and reducing production costs in the semiconductor industry.
 |
Please login to download the paper. No account yet? Please register. It's free! |