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Next-Generation PFA for the Semiconductor Industry
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ABSTRACT
PFA (tetrafluoroethylene and perfluoroalkylvinylether copolymer) is used to manufacture tubing, wafer baskets, tank linings, etc. used in the wet processes of the semiconductor industry. We have developed a new type of PFA to meet the market demand for higher purity and performance. Its main characteristic is reduced spherulite size, which is controlled to improve the transparency, smoothness, and solution permeability of the final components. Stress crack resistance is also improved by optimising polymer composition. These physical properties will contribute to improving production yield and reducing production costs in the semiconductor industry.
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