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JOHN BAXTER, Swagelok Company, Solon, OH, USA

ABSTRACT
Nearly every process that adds, alters, or removes material on silicon wafers uses process gases, which are distributed through stainless steel tubing and controlled and measured by valves, filters, gas purifiers, pressure regulators and transducers, etc. The layout of these combined components – known as the gas stick – has undergone radical design changes in recent years as it keeps pace with the fast-changing wafer fabrication technology. Conventional gas sticks, fabricated with welds and tube fittings, are increasingly giving way to modular gas systems, which, in their latest generation, offer decided benefits in terms of footprint, serviceability, accessibility, and design versatility.