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Kevin Monahan, Adil Engineer, Goerges Falessi, Matt Hankinson, Sung Jin Lee, Ady Levy & Mike Slessor, KLA-Tencor Corporation, San Jose, CA, USA

ABSTRACT
Previously, we have developed a simple microeconomic model that directly links metrology, yield, and profitability. The model has been used to explain the effect of metrology on gross margins in 200mm and 300mm factories. The same model can be adapted to evaluate the relative economic impact of accelerated design-rule shrinks in demand-limited markets. Using examples relevant to the highvolume production of memory products, we demonstrate that metrology-driven shrinks are still the most cost-effective way to improve profitability. We also describe the means by which these shrinks can be achieved in high-volume factories.