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Manufacturable strained silicon technology

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P.R. Chidambaram, Texas Instruments, Richardson, TX, USA

ABSTRACT

In the last year most semiconductor manufacturers have announced the use of some form of strain enhancement in their production technology [1-4]. Strain is the most popular means of realizing the required node-on-node transistor performance improvements in recent times. This article will review the most popular and manufacturable strained silicon technologies.

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