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Leveraging Factory and Tool Automation to Deliver High-Volume, High-Mix of Qualified Product

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MARGARET BIGELOW, Brooks Automation, Chelmsford, MA, USA

The fabless-foundry business model promotes faster time-to-market for new products with relatively low business risks to all parties. Factory and tool automation is a critical success factor of the “fabless-foundry” business model. Factory and tool automation is the application of hardware, software, and services to:

1. Make manufacturing mistake-proof

2. Integrate process, equipment and product data, and analyze it statistically

3. Automate information handling and step-level material handling

(Source: R. C. Leachman, D. A. Hodges, “Benchmarking Semiconductor Manufacturing,” UC Berkeley, ESRC Publications #96-02) The impact of factory and tool automation on factory performance is discussed in detail.

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