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Intrinsic Equipment Effectiveness (IEE)
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P. PATRUNO, International Sematech, Austin, TX, USA
ABSTRACT
The advent of 300mm technology into active production may well have profound implications on the currently accepted international standard s . A revision of standards is proposed in the SEMI document 2679. This document is examined and discussed in detail. Further definitions of terminology have been proposed which render the valuation of the productivity of process and metrology equipment more effectively to those on the shop floor.
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