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Interconnect and Dielectric Technologies ‚?? What‚??s Actually Being Made and Sold?

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DICK JAMES & DAN STUDINER, Chipworks, Ottawa, Canada


Much has been said and written in the last few years about the evolution and revolution in semiconductor processing. The International Technology Roadmap for Semiconductors (ITRS) has been widely used as a predictor of what the industry needs, and where the industry is going. There also have been many claims by companies showing that they are in line with the Roadmap. So what is really happening? This paper sets out to give an insight into some of the real-world IC device current process parameters, rather than Roadmap wish-you-were-here pointers. In so doing, technology observers such as Chipworks are seeing a slightly different story emerge.

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