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Increasing Overall Equipment Effectiveness (OEE) in Fab Manufacturing

01 December 1999 | By Mark Osborne | White Papers > Edition 10, Fab Management

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SASS SOMEKH, Applied Materials, Inc., Santa Clara, CA, USA

ABSTRACT

Over the past couple of years, many semiconductor manufacturing executives have lamented about the low state of equipment utilization in their fabs. Indeed, the phrase overall equipment effectiveness (OEE) is now frequently seen in articles or discussions about fab manufacturing.

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