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in-line metrology and control of gas mixtures in semiconductor processing applications

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Josep Arnó (ATMI Inc.) and Craig Printy (National Semiconductor)

ABSTRACT

Under certain circumstances, the manufacture of electronic devices requires the use of dilute gases. These materials are typically supplied in premixed high-pressure cylinders containing the active gas in a dilute form. The pressures and delivery flow rates of these precursors are accurately controlled through sophisticated delivery systems that include mass flow controllers, pressure regulators, and transducers. However, typical delivery systems do not integrate equipment that measures the accuracy and real-time stability of the gas blend composition. Such chemical analyzers may be especially important to monitor the concentration of mixtures during doping applications where precise dosing is critical.
 

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