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Improving the interface between process equipment and facility systems through Design for Facilities

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Allan D. Chasey, PhD, PE, Del E. Webb School of Construction, Arizona State University, USA

ABSTRACT

Semiconductor manufacturing equipment is designed to meet the highly complex challenges of today’s semiconductor market. The focus historically has been on the process capability of the tool. Even though the requirements for the production equipment drive facility design, the impact of the equipment on facility costs is not usually considered in the cost of the process equipment. This paper explores how semiconductor manufacturing equipment can be designed to be more compatible with the facility and infrastructure support systems. By looking at some previously ignored semiconductor manufacturing equipment requirements, which ultimately impacted the facility and drove additional facility costs, some ideas will be outlined on how the interface with the facility and infrastructure systems can be made more effectively.

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