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Implementing Electrostatics Management for Semiconductor Capital Equipment: Understanding and…

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MEGAN BOUHAMAMA & ARNOLD STEINMAN, Ion Systems, Berkeley, CA, USA

ABSTRACT

Background. The SEMI ESD Task Force; staticcharge issues; SEMI Standard E78-0998 for electrostatic compatibility; industry impacts. Electrostatics management in the factory. Industry trends needing electrostatics management; electrostatic discharge (ESD) damage issues; attraction of particle contamination; equipment problems due to ESD; controlling static charge in equipment; controlling static charge in the cleanroom. The E78-0998 Static Budget Guide. Test methodologies and acceptable levels for static charge; definition of static sensitivity levels; test instrumentation (ESD simulators, Faraday cup, electrostatic fieldmeter, and EMI locators).Conclusions. Static-charge control has been recognised by SEMI as essential to ensuring equipment productivity. A comprehensive static-control programme requires grounding, dissipative materials, and air ionisation.

 

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