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How green is your fab?
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James Beasley, International SEMATECH Manufacturing Initiative (ISMI), USA
ABSTRACT
“Green manufacturing” has become one of the most popular slogans in the semiconductor world, but its use often pertains to specific processes and products.
While commendable, these green products and processes are merely part of a more global vision that the industry must adopt to inculcate environmental
manufacturing into current and new chip factories. The Green Fab – an integrated system of specially engineered tools, methods, products, and supporting
technologies – must become the industry’s ultimate environmental goal. In this article, we define the Green Fab; identify its drivers and benefits; survey the current
state of Green Fab design; and introduce ISMI’s Green Fab Value Initiative, an effort to extend environmental best practices and standards throughout the industry.