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MING-SHAN JENG & FANGHEI TSAU, Industrial Technology Research Institute, Chutung, Taiwan, ROC

ABSTRACT

It would appear that fan filter units are not as rigorously performance tested as the Fab managers would assume. There is evidently considerable advantage in terms of power cost savings and efficiency of throughput if there existed a suitable standard form of testing to provide accurate equipment comparisons. This article examines and produces results for a test system which might well solve many of these problems and give the Cleanroom designer the possibility of optimising the airflow system to the customer’s needs for maximum efficiency and minimum running cost at the equipment selection stage