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Fab Layout for 300mm Mass-Production Lines
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KWON-SU PARK, SEOK-HEE PARK & SEUNG-HOON AHN, Samsung Semiconductors, Kyunggi-Do, Korea
ABSTRACT
What will 12 inch semiconductor fabs look like? There has been so much effort to establish standards and guidelines for 12 inch semiconductor fabs that we may feel that the era of 12 inch fabs has already come, and wait for high-volume production. But there still exists a question mark. This article covers several topics, ranging from defining the initial layout design concept to analysing the layout from the viewpoint of material flow.
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