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EHS Analysis of Advanced CVD Processes
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LAURA MENDICINO, VICTOR VARTANIAN, BRIAN GOOLSBY & PAUL THOMAS BROWN,
Motorola, DigitalDNA™ Laboratories, Austin, TX, USA
ABSTRACT
Many chemical vapour deposition (CVD) processes utilise new precursors and it is important to carry out environment, health and safety assessment of these during their use in R&D. Emissions characterisation is key to this process and a dry, hot scrubber system is described that can be utilised for point-of-use abatement in these advanced CVD processes.
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