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Effective PFC Gas Abatement in a Production Environment
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ABSTRACT
The gaseous by-products of a Semiconductor Fab contain some very stable PFCs and the prevention of environmental contamination is a major problem for the Fab engineer. The reactant products from any gaseous clean-up have a nasty habit of clogging up the decontamination system and can cause continual process interruption and loss of production. An ingenious system has been developed which circumvents these problems by use of a ceramic matrix combustion system. This method could well have wide ranging applications when extended to industries other than our own.
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