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Easy vacuum solution for the load locks in the DEPx coating system

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Martin Bijker, OTB-Solar, Eindhoven, Netherlands, Chistopher M. Rippl & Frank Klabunde, Pfeiffer

ABSTRACT

OTB-Solar, a manufacturer of solar cell coating systems has developed a new type of SiN anti-reflection coating system DEPx (see Figure 1).  In this system three load - lock chambers are necessary. In the past it was necessary to equip these loadlock chambers with a combination of a turbopump and a backing pump to reach the specifications. This led to a high installation effort with three valves, a bypass for the turbopump and complex system software to control this vacuum system. To reduce this high effort of installation and cost OTB-Solar has developed a new loadlock system that uses the OnTool™ Booster pump from Pfeiffer Vacuum, a pump that reaches a final pressure of less than 10e–5 mbar while working direct against atmospheric pressure. The installation of a turbopump is now no longer necessary. Only the OnTool™ Booster and a single valve are necessary to evacuate a load-lock chamber.

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