Online information source for semiconductor professionals

Dominant role of single-wafer manufacturing in providing sustained growth of the semiconductor indus

Popular articles

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008

R. Singh1, A. Venkateshan1, M. Fakhruddin1, K. F. Poole1, N. Balakrishnan2 & L.D. Fredendall2, 1Center for Silicon Nanoelectronics, Clemson University, Clemson, SC, USA, 2Department of Management, Clemson University, Clemson, SC, USA

ABSTRACT

In this paper we have described the importance of single wafer processing (SWP) in semiconductor industry.. As compared to batch processing, reduced cycle time, reduced processing temperature, reduced process variation and reduced defect densities are some of the attractive features of SWP

Download Please login to download the paper. No account yet? Please register. It's free!

Related articles

Better Productivity and Faster Cycle Times Through Single- Wafer Processing - 01 June 2000

Tool Order: Major foundry selects Optima XE implanter from Axcelis - 15 October 2009

MEMS the word - 04 February 2011

Elpida Memory increases capital spending - 07 August 2008

CMP consumables supplier shakeout seen by Techcet - 02 June 2010

Reader comments

No comments yet!

Post your comment

Name:
Email:
Please enter the word you see in the image below: