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Dominant role of single-wafer manufacturing in providing sustained growth of the semiconductor indus
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R. Singh1, A. Venkateshan1, M. Fakhruddin1, K. F. Poole1, N. Balakrishnan2 & L.D. Fredendall2, 1Center for Silicon Nanoelectronics, Clemson University, Clemson, SC, USA, 2Department of Management, Clemson University, Clemson, SC, USA
ABSTRACT
In this paper we have described the importance of single wafer processing (SWP) in semiconductor industry.. As compared to batch processing, reduced cycle time, reduced processing temperature, reduced process variation and reduced defect densities are some of the attractive features of SWP
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