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Developments in Ceramics for Semiconductor Processing
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Saint-Gobain Industrial Ceramics, Inc., Northboro, MA, USA
ABSTRACT
Recent advances in ceramic materials and processing technologies have enabled manufacturers of ceramics to overcome critical problems of contamination control. These advances also enable efficient thermal and mechanical designs, as well as appropriate electrical and optical properties for future semiconductor processing. This article summarizes the benefits provided by the properties of ceramics and the ease of fabrication of ceramic components for the next generation of semiconductor processing.
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