Online information source for semiconductor professionals

Cost reductions from water conservation efforts at Motorola

01 September 2002 | By Mark Osborne | White Papers > Edition 17, EHS

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008

Brian Raley & Chris Nauert, Motorola, Austin, Texas, USA

ABSTRACT

With the recent economic downturn in the semiconductor industry, methods to reduce expenses and lower the break-even point have grown in importance. Cost reduction efforts that can be implemented with little to no expense are, and will continue to be, the preferred mechanism for cost reduction. Cost reductions from water conservation are sometimes overlooked, but can provide annual cost savings in addition to resource conservation. With the industry moving to a larger wafer size, increased ultrapure water (UPW) purity requirements and an increase in process steps, there is a potential for UPW consumption and the associated costs to increase if conservation measures are not implemented. Motorola has investigated numerous cost reduction efforts from water conservation at several different sites. This paper will discuss some of the recently implemented and relatively simple water use reduction activities including flow standardization across tools (in CMP, fab support equipment and wet cleans) as well as wait-time flow reduction, RCA clean rinse reduction, and installation of restrictive flow orifices in CMP slurry lines.

Download Please login to download the paper. No account yet? Please register. It's free!

Related articles

Energy Savings Turn into Cash Flow Savings - 01 December 2002

Intel‚??s Ocotillo campus gains EPA water efficiency award - 05 December 2007

Water reuse in the semiconductor industry ‚?? myth or reality? - 01 September 2003

Making the most of energy conservation - 01 June 2005

Measurement of conservation of energy by semiconductor manufacturing equipment and setting of target - 01 March 2007

Reader comments

No comments yet!

Post your comment

Name:
Email:
Please enter the word you see in the image below: