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Copper CMP treatment using the Copper Selectâ?˘ process

01 March 2005 | By Mark Osborne | White Papers > Edition 25, EHS

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Michael W. Wismer & Richard E.Woodling, USFilter, Milpitas, CA, USA

ABSTRACT

The Copper Select™ process is being used at many semiconductor Fabs around the world to successfully treat copper-bearing CMP wastewaters. The patented process removes copper from wastewater without removing the CMP slurry particles. Studies have shown the process to be very successful with most commercially available copper slurry formulations.

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