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Copper CMP treatment using the Copper Select™ process
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Michael W. Wismer & Richard E.Woodling, USFilter, Milpitas, CA, USA
ABSTRACT
The Copper Select™ process is being used at many semiconductor Fabs around the world to successfully treat copper-bearing CMP wastewaters. The patented process removes copper from wastewater without removing the CMP slurry particles. Studies have shown the process to be very successful with most commercially available copper slurry formulations.
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