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JON SIGLER, STMicroelectronics Inc., Carrolton, TX, USA
CURTIS LAUSH, Radian International Electronic Systems, Austin, TX, USA

ABSTRACT

The need has been created for emission measurement equipment capable of extremely precise quantification of both process gases and process gas by-products. One such technology includes the use of mobile Fourier transform infrared (FTIR) spectroscopic equipment for emissions characterization. This article presents the design, capabilities, and testing methodologies of an extractive FTIR system used in process effluent testing on two epitaxial tools at the STMicroelectronics, Carrollton, Texas facility. It was observed that the exhaust streams are highly dynamic in nature, and sufficient characterization required the near-real-time capabilities that extractive FTIR offers. As a result, it is demonstrated that extractive FTIR is an important and relevant tool as the semiconductor industry faces the challenges of the next century.