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Better Productivity and Faster Cycle Times Through Single- Wafer Processing

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Significantly better productivity and improved cycle times are two aspects of the future of semiconductor manufacturing. Faster cycle times, better equipment utilisation and faster yield ramps dictate a flexible factory with small batch sizes and fab-wide automation. Full automation will be a key foundation for all 300 mm factories; this is a critical enabler for single-wafer lot processing. As the industry continues to move to more single-wafer processing, cycle times will continue to decrease. This article demonstrates the benefits of single-wafer spin-process equipment versus a wet bench. It shows that using single-wafer lot processing keeps us on the industry’s blistering costreduction path.

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