Online information source for semiconductor professionals

JOHN MCCLOSKEY, Composites USA, Inc., North East, MD, USAABSTRACT

ABSTRACT 

Facility cost and building code requirements impose more stringent criteria on fume exhaust duct design for semiconductor fabrication facilities than is generally seen in the rest of the chemical process industry. This article summarises the requirements. Lined stainless steel and fibreglassreinforced plastic choices available to the designer or facility manager to satisfy these requirements are compared and contrasted. Significant differences in performance in flammability, smoke generation and corrosion resistance are noted.