Online information source for semiconductor professionals

An Ultra-High-Purity Bulk Specialty Gas Package for 300mm Wafer Fabrication

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

Longmont, CO, USA
DAVID TREADWELL, CP Industries, Inc., McKeesport, PA, USA
JOHN W. FELBAUM, Digital Wave Corporation, Englewood, CO, USA


Semiconductor processes have reached a point requiring an evolutionary leap in speciality gas delivery. Conventional gas delivery from cylinders requires frequent cylinder changes and multiple connections, which increases the probability of impurity introduction, decreases the lifetime of the gas manifolds and increases the chance of accidents. Additionally, conventional gas delivery requires many more components and manifolds to deliver an equal amount of gas compared with a bulk source. The economic and technical advantages of bulk gas systems offer a solution to the demands of next-generation wafer processing. Bulk systems have distinct advantages over conventional cylinders in terms of safety, gas consistency, quality control, purity levels and cost. The first worldclass bulk speciality gas container for corrosive and reactive gases has been produced. The inner surface of the container consists of polished, electrolytically deposited nickel-200, with externally threaded end connections made from Hastelloy C-22™. This configuration ensures that all wetted areas of the container are made from corrosion-resistant materials. Although the package can be used for nearly all speciality gases, it has been demonstrated to be quite effective with corrosive gases. The package has been extensively investigated and results are presented from measurements of surface roughness, particle contamination, moisture concentration, inboard leak rates, outboard leak rates and metal contamination. Metals data from shelf life studies was obtained after one year, and will also be presented.

Download Please login to download the paper. No account yet? Please register. It's free!

Related articles

Air Liquide wins new supply contracts with Hynix‚??s 300mm fabs - 10 June 2008

PFA trace metals leaching ‚?? determining future improvements in bulk chemical delivery distribution - 01 June 2006

Edition 38: Evaluation of particle shedding and trace metal extraction from high purity pumps - 25 February 2009

JSR and Tri Chemical to jointly produce high-grade raw materials - 20 March 2009

Matheson Tri-Gas gains rights to Gelest‚??s high purity germane product - 06 January 2010

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: