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RANDY BRUMMETT, Brummett & Associates, Newport Beach, CA, USA
TOM CONWAY, Applied Micro Circuits Corporation (AMCC)

ABSTRACT
Semiconductor manufacturing requires usage of many different chemicals in various states of gases, liquid and solid materials. Air permitting is the most complex and long lead permit application phase associated with new and expansion plans in semiconductor processing. There are virtually one hundred chemicals to project, quantify and estimate potential emissions from numerous process equipment and air pollution devices. The detailed spreadsheet will show the complexity of the proposed facility and associated permit application process in the San Diego County Air Pollution Control District located in southern California. The California toxic air contaminant process addressing carcinogenic, chronic and acute exposure makes the permit application process even more complex. Not only are emissions evaluated, but also quantities stored on site and potential emergency releases require estimation and emission modelling. The permit process can take from one to two years to acquire, so upfront planning is a key element to obtaining a successful air permit and one that represents a factory’s realistic chemical throughput and mass balance