Online information source for semiconductor professionals

Air Permit Issues

01 June 2000 | By Mark Osborne | White Papers > Edition 12

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

RANDY BRUMMETT, Brummett & Associates, Newport Beach, CA, USA
TOM CONWAY, Applied Micro Circuits Corporation (AMCC)

Semiconductor manufacturing requires usage of many different chemicals in various states of gases, liquid and solid materials. Air permitting is the most complex and long lead permit application phase associated with new and expansion plans in semiconductor processing. There are virtually one hundred chemicals to project, quantify and estimate potential emissions from numerous process equipment and air pollution devices. The detailed spreadsheet will show the complexity of the proposed facility and associated permit application process in the San Diego County Air Pollution Control District located in southern California. The California toxic air contaminant process addressing carcinogenic, chronic and acute exposure makes the permit application process even more complex. Not only are emissions evaluated, but also quantities stored on site and potential emergency releases require estimation and emission modelling. The permit process can take from one to two years to acquire, so upfront planning is a key element to obtaining a successful air permit and one that represents a factory’s realistic chemical throughput and mass balance
Download Please login to download the paper. No account yet? Please register. It's free!

Related articles

manufacturing constraints ‚?? reducing volatile organic compound air emissions - 01 June 2006

Photoresist issues for sub-100nm lithography - 01 March 2003

Supply Chain Issues for Semiconductor Foundries - 01 March 2002

Taking control of the copper process at 65 nmTaking control of the copper process at 65 nm - 01 December 2003

Soitec Group announces Smart Stacking ready for manufacturing and technology transfer - 27 March 2009

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: