Online information source for semiconductor professionals
A life-cycle cost (LCC) fab model – interaction between activities in IC manufacturing and their s
Popular articles
Voltaix names Peter Smith as CEO - 09 November 2011
Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010
TSMC hosts 2008 Green Forum on ‘green’ factories - 31 October 2008
Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008
TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008
N. Van Hoornick, K. Van den Broeck, J. Van Hoeymissen & M. Heyns, IMEC, Heverlee, Belgium, W. Riedel & C. Braun, M+W Zander, Stuttgart, Germany
ABSTRACT
This article describes a life-cycle cost model that takes the complex interaction between activities in ICmanufacturing and their supporting facilities within a fab into account. In addition, the model provides all necessary outputs for environmental impact modelling such as gaseous emissions, concentrations of wastewater compounds, etc.
 |
Please login to download the paper. No account yet? Please register. It's free! |