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A Comprehensive Approach for Delivery of Low-vapour-pressure Process Chemicals
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JEAN M. FRIEDT, Air Liquide, Paris, France
HWA CHI WANG, RICK UDISCHAS, Air Liquide, Countryside, IL, USA
HERVE DULPHY, Air Liquide, Le Pont de Claix, France
ABSTRACT
Anumber of new challenges arise in the distribution technologies of chemicals for semiconductor manufacturing. They result on the one hand from the introduction of larger wafer sizes and the consequent increase of chemicals consumption rate and, on the other hand, from the introduction of the new materials which are required at reduced device dimensions. We describe here recent developments in vapour phase chemicals supply technologies, which provide improved quality, reliability and safety, as well as optimised cost of ownership.
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