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300mm fab automation: Towards 7th heaven
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Mark Osborne, Editor-in-Chief, Semiconductor Fabtech
ABSTRACT
During the 16th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference, held during SEMICON Europa, 11-12th of April 2005, presentations from Intel, in particular, provided insight into the constantly evolving world of 300mm fab automation. The drive towards fully integrated and highly automated operations to improve cycle times, yield and overall manufacturing efficiencies is seen as a competitive advantage. We review the key presentations at this years ASMC Conference that discussed 300mm fab automation practises and future developments.
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